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TFM-500

Film Thickness Analyzer 

  • Brand：VINE
  • Model：TFM-500
  • Industries：Electronics、Semiconductors、Plastics、Biomedicine
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Features

■ TFM-500 Series

TFM-500 Series is an auto motorized non-contact coating and thin film thickness analyzer(Reflectometer). 
TFM has a user friendly interface that enables anyone to get results easily.
*Non-contact and Non-destructive
*Simple measurement with a few buttons
*Creating a XY mapping with a few buttons
*Various substrates (wafer, glass, metal, etc.)

Specifications

*Measurement range:  0.3 ㎛ to 500 ㎛ (depending on film type)
*Measurement spot size:​ Approximately 4 mm
*Repeatability(10x): ≤ 0.001 ㎛ at 1-㎛ SiO2 on Si Wafer
*Stage size: motorized 30 x 30 cm (Other sizes are also possible.)
*Detector: 60 x 60 x 25 cm

Standards
Related Products

Film Thickness Analyzer

  • TFM-100

TFM-100 Film Thickness Analyzer

  • TFM-100
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