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TFM-100

Film Thickness Analyzer

Features

The TFM-100 series is a non-contact coating and film thickness analyzer (optical reflection).
TFM features an intuitive and easy-to-use interface, allowing anyone to easily obtain measurement results.

  • Non-contact and non-destructive measurement
  • Simple operation with just a few button presses
  • Supports various substrates (wafers, glass, metals, etc.)
    The TFM-100 is ideal for measuring single-layer coatings, such as photoresist (PR) or similar materials.
Specifications

*Measurement range:  0.3 ㎛ to 500 ㎛ (depending on film type)
*Measurement spot size:​ Approximately 4 mm (Option: 40 ㎛, 80 ㎛)
*Repeatability(10x): ≤ 0.001 ㎛ at 1-㎛ SiO2 on Si Wafer
*Stage size: 20 x 20 cm
*Detector: 22 x 22 x 7 cm

Standards
Related Products

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